JPS6183033U - - Google Patents
Info
- Publication number
- JPS6183033U JPS6183033U JP16814384U JP16814384U JPS6183033U JP S6183033 U JPS6183033 U JP S6183033U JP 16814384 U JP16814384 U JP 16814384U JP 16814384 U JP16814384 U JP 16814384U JP S6183033 U JPS6183033 U JP S6183033U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- constant temperature
- processing solution
- chamber
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984168143U JPH0217477Y2 (en]) | 1984-11-06 | 1984-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984168143U JPH0217477Y2 (en]) | 1984-11-06 | 1984-11-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6183033U true JPS6183033U (en]) | 1986-06-02 |
| JPH0217477Y2 JPH0217477Y2 (en]) | 1990-05-16 |
Family
ID=30725923
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984168143U Expired JPH0217477Y2 (en]) | 1984-11-06 | 1984-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0217477Y2 (en]) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58123730A (ja) * | 1982-01-18 | 1983-07-23 | Toshiba Corp | 半導体ウエハ−エツチング装置 |
| JPS5943523A (ja) * | 1982-09-03 | 1984-03-10 | Yamagata Nippon Denki Kk | 半導体エツチング処理における薬液供給方法 |
-
1984
- 1984-11-06 JP JP1984168143U patent/JPH0217477Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58123730A (ja) * | 1982-01-18 | 1983-07-23 | Toshiba Corp | 半導体ウエハ−エツチング装置 |
| JPS5943523A (ja) * | 1982-09-03 | 1984-03-10 | Yamagata Nippon Denki Kk | 半導体エツチング処理における薬液供給方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0217477Y2 (en]) | 1990-05-16 |